| 產(chǎn)品特性 : | 熱銷 | 類型 : | 氣體捕集泵 |
| 品牌 : | 愛發(fā)科 | 型號 : | LR3601-T(TT) |
| 材質(zhì) : | 鑄鐵 | 用途 : | 管道泵 |
| 原理 : | 羅茨泵 | 真空度 : | 高真空度 |
| 驅(qū)動方式 : | 電動 | 性能 : | 耐磨 |
| 極限壓力 : | 0.67 | 泵軸位置 : | 臥式 |
| 抽氣速率 : | 888 | 抽氣量 : | 3200m3/h |
| 重量 : | 720 | 電壓 : | 180～240/380～440（50/60） |
| 排出口徑 : | KF50 | 流量 : | 3200 |
| 規(guī)格 : | LR3601-T(TT) |
多級羅茨型干泵
LR 系列
LR3601-T(TT)
ULVAC
干泵LR系列，根據(jù)獨有的高溫均熱化技術(shù)，有效利用壓縮熱，實現(xiàn)了在CVD，蝕刻等硬工藝中的高耐久性。在輕工藝中，與ECO-SHOCK的組合 多可節(jié)省約80%的電力。 另外，提高了維護性和降低了噪音，全部型號CE對應(yīng)可能（可選）。關(guān)于ECO-SHOCK的詳細信息，請參考關(guān)聯(lián)信息。
特點
LR系列：低溫領(lǐng)域
不單是惰性氣體，還特別適用于裝載和卸載室中的排氣，縮短排氣時間以增加產(chǎn)量。HR系列/UR系列：高溫領(lǐng)域
CVD，蝕刻等產(chǎn)生的可升華的廢氣物質(zhì)可以在氣體狀態(tài)下排出。1000毫秒內(nèi)瞬時中斷。
符合CE標志（可選）。
用途
活性氣體（CVD、干刻等）
惰性氣體（濺射,蒸發(fā)，熱處理等）
放入取出室排氣時間縮短（LR系列）
產(chǎn)生粉塵的工藝的排氣（Si單晶體上升等）
作為輔助排氣泵（渦輪分子泵、機械增壓泵的輔助排氣）
規(guī)格
| Model | LR1800 | UR1800 | LR3601 | LR3601-TT | LR3601-R | LR3601-TR(TTR) | UR3601-TT | |||
| Pump | DRP | LR180 | UR180 | LR421 | LR421-T | LR421 | LR421-T | UR421-T | ||
| MBP | PRC-018A | PRC-036C | PRC-036C(-T) | PRC-036D | PRC-036D(D-T) | PRC-036C-T | ||||
| Max. pumping speed | m3/h | 50Hz | 1701 | 1701 | 3200 | 2700 | ||||
| 60Hz | 1784 | |||||||||
| L/min | 50Hz | 28350 | 28350 | 53333 | 45000 | |||||
| 60Hz | 29700 | |||||||||
| Ultimate pressure | Pa | 0.67 | ||||||||
| Max. inlet pressure | Atmospheric pressure?* | |||||||||
| Max. exhaust pressure | 1.0 to Atmospheric pressure | |||||||||
| Inlet diameter (type CE) | VG150(KF100) | VG150 | ||||||||
| Outlet diameter | KF40 | KF50 | ||||||||
| DRP: Rotor blade surface treatment | ○ | ○ | ○ | ○ | ○ | ○ | ○ | |||
| MBP: Rotor blade surface treatment | ○ * | ○ | × | T：× TT：○ | × | TR：× TTR：○ | ○ | |||
| Weight | kg | 553 | 660 | 720 | 660 | 720 | 720 | |||
| Power | Three phase | VAC(Hz) | 200（50/60),220(60) | 180～240/380～440（50/60） | ||||||
| Current | At ultimate pressure | A | 21.4 | 29.2 | 31 | 35.4 | 39.8 | |||
| At max. load | A | 39.8 | 34.9 | 58.4 | 82 | 68.3 | ||||
| Cooling water Supply pressure |
MPa | 0.1 to 0.3 | 0.2 to 0.5 | |||||||
| Cooling water In/Out differrencepressure |
MPa | ＞0.1 | ＞0.2 | |||||||
| Cooling water Flow rate |
L/min | ＞5.0 | ＞4.0 | ＞5.0 | ||||||
| N2?gas | Supply pressure | MPa | 0.1 ～ 0.5 | |||||||
| Regula- ted pressure |
MPa | 0.05 ～ 0.1 | ||||||||
| N2?purge |
Shaft purge | SLM | 5 | |||||||
| Gas ballast | SLM | 0～45 | 0～195 | None?*1 | 0～45 | None?*1 | 0～45 | 0～195 | ||
*Please specify voltage at the time of ordering.
*LR pump designed for low operating temperature of the pump body. The HR is for high temperature pump body operation. While the UR series is for Ultra High pump body temperature.
*The HR300, HR600, HR1200,UR600,UR1200,UR1800 and UR3601-TT models should all be operated below 200Pa (1.5 Torr).
*The LR3601-R/TR/TTR is an improved exhaust performance model in the high-pressure area.
* 〇=with ×=with out
* MBP of LR300, LR600, LR1200, LR1800, can choose the existence of a surface treatment.
* Additionally, a pump with gasballast use is possible to quote. Please contact us for the selection and quotation.
■Silencer (Option)
| Model | Material | Surface treatment | Weight (kg) | Flange Connection |
| RS-01 | SUS304 | GBB treatment | 4.1 | NW40 |
| RS-02 | SUS304 | GBB treatment | 8.3 | NW40 |
| RS-03 | SUS304 | Polished plate | 12.5 | NW50 |
■Acceptable Table
| Kit type | Agreement | Clamp | Outer ring | Connection Flange | Stay |
| RS-01 kitA | LR60,LR90,LR300 | 1 | 1 | - | - |
| RS-01 kitB | LR600,LR1200 | 2 | 2 | 1 | 1 |
| RS-02 kitA | LR180（LR60,LR90,LR300） | 2 | 2 | 1 | 1 |
| RS-02 kitB | LR1800（LR600,LR1200） | 2 | 2 | 1 | 1 |
| RS-03 kitA | LR421(-T) | 1 | 1 | 1 | 1 |
| RS-03 kitB | LR3601(-T/TT/R/TR/TTR） | 3 | 3 | 1 | 1 |